Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084279 | Method of manufacturing semiconductor device that uses both a normal photomask and a phase shift mask for defining interconnect patterns | Tatsuo Kasaoka, Noboru Mori, Kazunobu Miki | 2011-12-27 |