Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084279 | Method of manufacturing semiconductor device that uses both a normal photomask and a phase shift mask for defining interconnect patterns | Kiyohiko Sakakibara, Noboru Mori, Kazunobu Miki | 2011-12-27 |
| 8072074 | Semiconductor device and method of manufacturing same | Atsushi Hachisuka, Atsushi Amo, Shunji Kubo | 2011-12-06 |
| 7884480 | Semiconductor device and method of manufacturing same | Atsushi Hachisuka, Atsushi Amo, Shunji Kubo | 2011-02-08 |