Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003174 | Method for forming dielectric film using siloxane-silazane mixture | Atsuki Fukazawa, Nobuo Matsuki | 2011-08-23 |
| 7972980 | Method of forming conformal dielectric film having Si-N bonds by PECVD | Akira Shimizu | 2011-07-05 |
| 7919416 | Method of forming conformal dielectric film having Si-N bonds by PECVD | Akira Shimizu, Atsuki Fukazawa | 2011-04-05 |