Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080282 | Method for forming silicon carbide film containing oxygen | Atsuki Fukazawa, Manabu Kato | 2011-12-20 |
| 8003174 | Method for forming dielectric film using siloxane-silazane mixture | Atsuki Fukazawa, Woo Jin Lee | 2011-08-23 |