Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083892 | Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same | Young-Min Min, Do-In Bae, Yun-Sik Yang, Wan-Goo Hwang, Jin-Man Kim | 2011-12-27 |
| 7952048 | Plasma source with discharge inducing bridge and plasma processing system using the same | Soon-Im Wi | 2011-05-31 |
| 7862681 | Plasma processing system and method of contolling the same | — | 2011-01-04 |