Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8018163 | Capacitively coupled plasma reactor | — | 2011-09-13 |
| 7952048 | Plasma source with discharge inducing bridge and plasma processing system using the same | Dae-Kyu Choi | 2011-05-31 |