Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947098 | Method for manufacturing chemical mechanical polishing pad polishing layers having reduced gas inclusion defects | John Esbenshade, Andrew M Geiger, Paul Libbers, Paul J. Sacchetti, Jonathan Tracy +2 more | 2011-05-24 |