Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7878061 | Micromechanical system including a suspension and an electrode positioned movably | Johannes Classen, Arnd Kaelberer, Patrick Wellner, Dietrich Schubert | 2011-02-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7878061 | Micromechanical system including a suspension and an electrode positioned movably | Johannes Classen, Arnd Kaelberer, Patrick Wellner, Dietrich Schubert | 2011-02-01 |