Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7919346 | Micromechanical component and manufacturing method | Jens Frey | 2011-04-05 |
| 7878061 | Micromechanical system including a suspension and an electrode positioned movably | Johannes Classen, Patrick Wellner, Dietrich Schubert, Lars Tebje | 2011-02-01 |