Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999643 | Providing a common environment for multiple MEMS devices | David C. Dening, Julio C. Costa | 2011-08-16 |
| 7985611 | Method for manufacturing integrated MEMS resonator device | Julio C. Costa, Jonathan Hale Hammond | 2011-07-26 |
| 7956429 | Insulator layer based MEMS devices | Sangchae Kim, Julio C. Costa | 2011-06-07 |
| 7868403 | Integrated MEMS resonator device | Julio C. Costa, Jonathan Hale Hammond | 2011-01-11 |
| 7863071 | Combined micro-electro-mechanical systems device and integrated circuit on a silicon-on-insulator wafer | Julio C. Costa, Jonathan Hale Hammond, Walter Wohlmuth | 2011-01-04 |