Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985611 | Method for manufacturing integrated MEMS resonator device | Tony Ivanov, Julio C. Costa | 2011-07-26 |
| 7868403 | Integrated MEMS resonator device | Tony Ivanov, Julio C. Costa | 2011-01-11 |
| 7863071 | Combined micro-electro-mechanical systems device and integrated circuit on a silicon-on-insulator wafer | Tony Ivanov, Julio C. Costa, Walter Wohlmuth | 2011-01-04 |