Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075704 | Method for the removal of airborne molecular contaminants using oxygen and/or water gas mixtures | Daniel Alvarez, Jr., Russell J. Holmes, Allan Tram | 2011-12-13 |
| 7879137 | Lithographic projection apparatus, purge gas supply system and gas purging method | Bipin Parekh, Robert S. Zeller, Russell J. Holmes | 2011-02-01 |