Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7879137 | Lithographic projection apparatus, purge gas supply system and gas purging method | Jeffrey J. Spiegelman, Robert S. Zeller, Russell J. Holmes | 2011-02-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7879137 | Lithographic projection apparatus, purge gas supply system and gas purging method | Jeffrey J. Spiegelman, Robert S. Zeller, Russell J. Holmes | 2011-02-01 |