Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7935634 | Integrated circuits, micromechanical devices, and method of making same | Maik Liebau, Thomas Betzl, Olaf Storbeck, Guenther Aichmayr | 2011-05-03 |
| 7910210 | Method of producing a layer arrangement, method of producing an electrical component, layer arrangement, and electrical component | Franz Kreupl, Maik Liebau, Christian Kapteyn | 2011-03-22 |