Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7935634 | Integrated circuits, micromechanical devices, and method of making same | Maik Liebau, Thomas Betzl, Olaf Storbeck, Georg Duesberg | 2011-05-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7935634 | Integrated circuits, micromechanical devices, and method of making same | Maik Liebau, Thomas Betzl, Olaf Storbeck, Georg Duesberg | 2011-05-03 |