Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7976718 | System and method for selective etching of silicon nitride during substrate processing | Ismail Kashkoush, Gim-Syang Chen | 2011-07-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7976718 | System and method for selective etching of silicon nitride during substrate processing | Ismail Kashkoush, Gim-Syang Chen | 2011-07-12 |