Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084280 | Method of manufacturing a solar cell using a pre-cleaning step that contributes to homogeneous texture morphology | Gim-Syang Chen | 2011-12-27 |
| 8056253 | Systems and methods for drying a rotating substrate | Zhi (Lewis) Liu, Hanjoo Lee | 2011-11-15 |
| 7976718 | System and method for selective etching of silicon nitride during substrate processing | Gim-Syang Chen, Richard A. Novak | 2011-07-12 |