Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7994026 | Plasma dicing apparatus and method of manufacturing semiconductor chips | Kiyoshi Arita, Tetsuhiro Iwai | 2011-08-09 |
| 7906410 | Method of manufacturing semiconductor chip using laser light and plasma dicing | Kiyoshi Arita | 2011-03-15 |