Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076649 | Charged particle beam writing apparatus and optical axis deviation correcting method for charged particle beam | Michihiro Sakai, Kiyoshi Hattori | 2011-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076649 | Charged particle beam writing apparatus and optical axis deviation correcting method for charged particle beam | Michihiro Sakai, Kiyoshi Hattori | 2011-12-13 |