Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076649 | Charged particle beam writing apparatus and optical axis deviation correcting method for charged particle beam | Michihiro Sakai, Ryoichi Kakehi | 2011-12-13 |
| 7893411 | Charged-particle beam writing apparatus and charged-particle beam writing method | Rieko Nishimura | 2011-02-22 |