Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8078012 | Pattern inspection apparatus and method | Takayuki Abe | 2011-12-13 |
| 8031932 | Pattern inspection apparatus and method | Takayuki Abe | 2011-10-04 |
| 7973918 | Apparatus and method for pattern inspection | Takayuki Abe | 2011-07-05 |
| 7872745 | Pattern inspection apparatus and pattern inspection method | Takayuki Abe, Tomohiro Iijima, Tetsuyuki Arai | 2011-01-18 |