Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8007166 | Method for optimizing direct wafer bond line width for reduction of parasitic capacitance in MEMS accelerometers | Henry C. Abbink, Howard H. Ge, Daryl K. Sakaida | 2011-08-30 |