Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977258 | Method and system for thermally processing a plurality of wafer-shaped objects | Zsolt Nenyei, Paul Janis Timans, Wilfried Lerch, Juergen Niess, Manfred Falter +6 more | 2011-07-12 |