Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7880392 | Plasma producing method and apparatus as well as plasma processing apparatus | Kenji Kato, Hiroshige Deguchi, Hitoshi Yoneda, Kiyoshi Kubota, Yuichi Setsuhara | 2011-02-01 |