Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7988835 | Silicon dot forming method and silicon dot forming apparatus | Eiji Takahashi, Takashi Mikami, Shigeaki Kishida, Kenji Kato, Atsushi Tomyo +2 more | 2011-08-02 |
| 7880392 | Plasma producing method and apparatus as well as plasma processing apparatus | Kenji Kato, Hiroshige Deguchi, Hitoshi Yoneda, Kiyoshi Kubota, Akinori Ebe | 2011-02-01 |