Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7978310 | Projection optical system, exposure system, and exposure method | Hironori Ikezawa, Yasuhiro Omura | 2011-07-12 |
| 7907268 | Surface inspection method and surface inspection device | Yoshihiko Fujimori | 2011-03-15 |