Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8009271 | Projection optical system, exposure apparatus, exposure system, and exposure method | — | 2011-08-30 |
| 7990609 | Catadioptric imaging system with prolate spheroidal-shaped mirrors | — | 2011-08-02 |
| 7978310 | Projection optical system, exposure system, and exposure method | Hironori Ikezawa, Yuji Kudo | 2011-07-12 |
| 7936441 | Projection optical system, exposure apparatus, and exposure method | — | 2011-05-03 |