Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8018577 | Illumination-sensor calibration methods, and exposure methods and apparatus and device-manufacturing methods including same, and reflective masks used in same | Hajime Yamamoto, Kazuaki Suzuki, Noriyuki Hirayanagi | 2011-09-13 |