Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8018577 | Illumination-sensor calibration methods, and exposure methods and apparatus and device-manufacturing methods including same, and reflective masks used in same | Hajime Yamamoto, Tohru Isogami, Noriyuki Hirayanagi | 2011-09-13 |
| 7924952 | Signal detection device, signal detection circuit, signal detection method, and program | Mikihiro Ouchi | 2011-04-12 |