Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7962868 | Method for forming a semiconductor device using optical proximity correction for the optical lithography | Robert Boone, Karl Wimmer, Christian Gardin | 2011-06-14 |
| 7935547 | Method of patterning a layer using a pellicle | Kyle Patterson, Sergei Postnikov | 2011-05-03 |