Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981789 | Feature patterning methods and structures thereof | Thomas Schulz | 2011-07-19 |
| 7935547 | Method of patterning a layer using a pellicle | Kevin Lucas, Kyle Patterson | 2011-05-03 |
| 7879727 | Method of fabricating a semiconductor device including a pattern of line segments | Thomas Schulz, Hans-Joachim Barth, Klaus von Arnim | 2011-02-01 |