Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7901509 | Heating apparatus with enhanced thermal uniformity and method for making thereof | Ajit Sane, Toshiki Ebata, Marc Schaepkens, Xiang Liu, Wei Fan | 2011-03-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7901509 | Heating apparatus with enhanced thermal uniformity and method for making thereof | Ajit Sane, Toshiki Ebata, Marc Schaepkens, Xiang Liu, Wei Fan | 2011-03-08 |