Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7943205 | Diffusion barrier coatings having graded compositions and devices incorporating the same | Kevin Warner Flanagan | 2011-05-17 |
| 7929269 | Wafer processing apparatus having a tunable electrical resistivity | David M. Rusinko, Wanxue Zeng | 2011-04-19 |
| 7901509 | Heating apparatus with enhanced thermal uniformity and method for making thereof | John Mariner, Ajit Sane, Toshiki Ebata, Xiang Liu, Wei Fan | 2011-03-08 |