Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062814 | Optical compensation devices, systems, and methods | Fei Wang, Pary Baluswamy | 2011-11-22 |
| 7985658 | Method of forming substrate for use in imager devices | Xiaofeng Fan, Richard A. Mauritzson | 2011-07-26 |
| 7947412 | Reduced lens heating methods, apparatus, and systems | Fei Wang | 2011-05-24 |
| 7864294 | Focus sensitive lithographic apparatus, systems, and methods | Fei Wang | 2011-01-04 |