Issued Patents 2011
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067133 | Phase shift mask with two-phase clear feature | — | 2011-11-29 |
| 8062814 | Optical compensation devices, systems, and methods | Xinya Lei, Pary Baluswamy | 2011-11-22 |
| 8034455 | Coating composition, substrates coated therewith and methods of making and using same | Philip Chihchau Liu | 2011-10-11 |
| 8034516 | Photomasks, methods of forming photomasks, and methods of photolithographically-patterning substrates | — | 2011-10-11 |
| 7974819 | Methods and systems for intensity modeling including polarization | Chung-Yi Lee | 2011-07-05 |
| 7961292 | Sub-resolution assist devices and methods | Anton P. Eppich | 2011-06-14 |
| 7947412 | Reduced lens heating methods, apparatus, and systems | Xinya Lei | 2011-05-24 |
| 7930657 | Methods of forming photomasks | William A. Stanton | 2011-04-19 |
| 7923181 | Methods of forming photomasks | — | 2011-04-12 |
| 7864294 | Focus sensitive lithographic apparatus, systems, and methods | Xinya Lei | 2011-01-04 |