Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8077377 | Spatial light modulator with structured mirror surfaces | — | 2011-12-13 |
| 8067134 | Method of iterative compensation for non-linear effects in three-dimensional exposure of resist | Mikael Wahlsten, Mats Ekberg, Anders Svensson | 2011-11-29 |
| 8057971 | Method of compensation for bleaching of resist during three-dimensional exposure of resist | Mikael Wahlsten, Mats Ekberg, Anders Svensson | 2011-11-15 |
| 7957055 | Pattern generator | — | 2011-06-07 |
| 7934172 | SLM lithography: printing to below K1=.30 without previous OPC processing | Igor Ivonin | 2011-04-26 |
| 7923182 | Multi-focus method of enhanced three-dimensional exposure of resist | Mikael Wahlsten, Mats Ekberg, Anders Svensson | 2011-04-12 |