Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067134 | Method of iterative compensation for non-linear effects in three-dimensional exposure of resist | Torbjorn Sandstrom, Mikael Wahlsten, Anders Svensson | 2011-11-29 |
| 8057971 | Method of compensation for bleaching of resist during three-dimensional exposure of resist | Torbjorn Sandstrom, Mikael Wahlsten, Anders Svensson | 2011-11-15 |
| 7923182 | Multi-focus method of enhanced three-dimensional exposure of resist | Torbjorn Sandstrom, Mikael Wahlsten, Anders Svensson | 2011-04-12 |