Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058173 | Methods for producing smooth wafers | Larry W. Shive | 2011-11-15 |
| 8042697 | Low thermal mass semiconductor wafer support | Lance G. Hellwig | 2011-10-25 |
| 7888685 | High purity silicon carbide structures | Larry W. Shive | 2011-02-15 |