Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076778 | Method for preventing Al-Cu bottom damage using TiN liner | Hsu-Sheng Yu, Hong-Ji Lee | 2011-12-13 |
| 7960835 | Fabrication of metal film stacks having improved bottom critical dimension | Han-Hui Hsu, Ta-Hung Yang, Shih-Ping Hong, Ming-Tsung Wu, An-Chi Wei +1 more | 2011-06-14 |