Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049345 | Overlay mark | Chin-Cheng Yang | 2011-11-01 |
| 8031329 | Overlay mark, and fabrication and application of the same | — | 2011-10-04 |
| 7988778 | Method of making composite coating and product formed with the composite coating | — | 2011-08-02 |
| 7927960 | Method of improving overlay performance in semiconductor manufacture | Chin-Cheng Yang | 2011-04-19 |
| 7916295 | Alignment mark and method of getting position reference for wafer | Chiao-Wen Yeh | 2011-03-29 |
| 7910168 | Method for forming a film on a substrate | — | 2011-03-22 |
| 7901872 | Exposure process and photomask set used therein | Chin-Cheng Yang | 2011-03-08 |