Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8025731 | Gas injection system for plasma processing | Alex Demos | 2011-09-27 |
| 7992518 | Silicon carbide gas distribution plate and RF electrode for plasma etch chamber | Robert Wu | 2011-08-09 |