Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7992518 | Silicon carbide gas distribution plate and RF electrode for plasma etch chamber | Tuqiang Ni | 2011-08-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7992518 | Silicon carbide gas distribution plate and RF electrode for plasma etch chamber | Tuqiang Ni | 2011-08-09 |