Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892445 | Wafer electrical discharge control using argon free dechucking gas | David Wei, Howard Dang, Masahiro Watanabe, Sean S. Kang, Kenji Takeshita +2 more | 2011-02-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892445 | Wafer electrical discharge control using argon free dechucking gas | David Wei, Howard Dang, Masahiro Watanabe, Sean S. Kang, Kenji Takeshita +2 more | 2011-02-22 |