Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076655 | Method of cleaning optical surfaces of an irradiation unit in a two-step process | Guenther Hans Derra, Christof Metzmacher, Achim Weber, Peter Zink | 2011-12-13 |
| 8040033 | Electrode device for gas discharge sources and method of operating a gas discharge source having this electrode device | Uladzimir Zhokhavets, Guenther Hans Derra | 2011-10-18 |