Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076655 | Method of cleaning optical surfaces of an irradiation unit in a two-step process | Guenther Hans Derra, Thomas Kruecken, Achim Weber, Peter Zink | 2011-12-13 |
| 8049188 | Method of cleaning a surface region covered with contaminant or undesirable material | Achim Weber | 2011-11-01 |