Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040030 | Method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp and a corresponding apparatus | Jeroen Jonkers | 2011-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040030 | Method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp and a corresponding apparatus | Jeroen Jonkers | 2011-10-18 |