Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040030 | Method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp and a corresponding apparatus | Dominik Marcel Vaudrevange | 2011-10-18 |
| 7897948 | EUV plasma discharge lamp with conveyor belt electrodes | Jakob Willi Neff, Ralf Pruemmer | 2011-03-01 |