Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7957066 | Split field inspection system using small catadioptric objectives | J. Joseph Armstrong | 2011-06-07 |
| 7952633 | Apparatus for continuous clocking of TDI sensors | David L. Brown, Kai Cao | 2011-05-31 |
| 7924892 | Fiber amplifier based light source for semiconductor inspection | J. Joseph Armstrong | 2011-04-12 |
| 7869121 | Small ultra-high NA catadioptric objective using aspheric surfaces | David Shafer, J. Joseph Armstrong | 2011-01-11 |