Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7957066 | Split field inspection system using small catadioptric objectives | Yung-Ho Alex Chuang | 2011-06-07 |
| 7924892 | Fiber amplifier based light source for semiconductor inspection | Yung-Ho Alex Chuang | 2011-04-12 |
| 7884998 | Catadioptric microscope objective employing immersion liquid for use in broad band microscopy | — | 2011-02-08 |
| 7869121 | Small ultra-high NA catadioptric objective using aspheric surfaces | David Shafer, Yung-Ho Alex Chuang | 2011-01-11 |