Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8073240 | Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer | Verlyn Michael Fischer, Chris Maher, Harish P. Hiriyannaiah, Younus Vora, Ping Ding | 2011-12-06 |
| 7940384 | Systems and methods for blocking specular reflection and suppressing modulation from periodic features on a specimen | Robert M. Danen | 2011-05-10 |